CSMH

Diamond Application Solutions of EUV Lithography CO2 Optical window

Diamond is characterized by extremely highhardness, high thermal conductivity andchemicalinertness.In addition, diamond iscomposed of carbon,alowZ(Z:atomicnumber)material, and is transparent toX-rays, which is essential for X-ray windows.
A CvD diamond window coated with a tungsten film is welded to a metal frame thatserves as an X-ray transmission target or high-power X-ray anode,and the tungstenlayer is irradiated (bombarded) with a high-en-ergy electron beam to create a single-pointX-ray source.

In this application, diamond plays two major roles: one, diamond takes advantage of its ul.tra-high thermal conductivity to rapidly conduct heat out of the focusing area; two, diamond has a high transmittance and can beused as a window for the transmission of X-rays. Therefore, by placing the object under study very close to the X-ray point sourcehigh-resolution and high-magnification X-rayinspection can pe realized.

Prof. Zhang, on behalf of CSMH, presented the following research results at the Semiconductor Applications Conference🎊

1. High-quality diamond single crystals were successfully realized using MPCVD, and a diamond single crystal film with p-type conductivity was obtained by boron (B) doping to achieve a wide range of modulation of the hole carrier concentration 1016~1019 cm-3, with a mobility of up to 327 cm-2/Vs.

2. Ga2O3 films were successfully epitaxialized on diamond substrates, and it was confirmed that Ga2O3 formed a specific epitaxial growth structure through the domain matching mechanism, and combined with the X-ray photoelectron spectroscopy, it was confirmed that the interface was a “staggered” type energy band arrangement.

3. The thermal boundary conductance (TBC) of the Ga2O3 and diamond interface obtained by PLD is 66 MW/m2-K , which is better than that of the current bonding method, and there is still a large potential to improve the thermal transport performance of the interface compared with the theoretically calculated results.

Single crystal diamond (thermal grade, optical grade, electronic grade) is one of the CSMH core products, which has the best thermal conductivity (up to 2200W/m·k) in all known natrual materials, as well as excellent properties such as high hardness, high chemical stability, high optical transmittance, extremely wide forbidden bandwidth, negative electrophilicity, high insulating property and good biocompatibility, etc.

With its wide range of application prospects in the high-tech fields such as super-precision machining, semiconductors, aerospace and aviation, Nuclear energy and other high-tech fields, it has become a hot research material in many fields of scientific research frontiers.
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Welcome to EuMW 2023，19– 21 September 2023，Our booth No. 587B，we bring many exhibits ，diamond wafer，diamond heat sink ，diamond window etc.